Gas and Pump Line Heating System
January 11, 2000
Watlow's gas and pump line heating system incorporates thermal components.
System incorporates thermal components that optimize chemical vapor deposition (CVD), metal etch process performance and process yields while reducing condensation, particle buildup and maintenance-related downtime. From Watlow Electric Mfg. Co., the system provides even heating up to 392°F (200°C) for uniform temperature profiles over the heated line.
January 2000, RS# 216