HPS JalapeEo valve is designed for use in semiconductor processes such as low pressure chemical vapor deposition. The device from MKS Instruments Inc. is available in single- and two-stage models with an angle or inline body and a choice of seal, limit switch and solenoid options. The valve also offers port sizes of 2, 3 and 4". Its low outside temperature enhances worker safety because the valve is safe to touch.
November 2000, RS# 241