Heated Vacuum Valve
November 22, 2000
Valve from MKS Instruments is designed for use in semiconductor processes.
HPS JalapeEo valve is designed for use in semiconductor processes such as low pressure chemical vapor deposition. The device from MKS Instruments Inc. is available in single- and two-stage models with an angle or inline body and a choice of seal, limit switch and solenoid options. The valve also offers port sizes of 2, 3 and 4". Its low outside temperature enhances worker safety because the valve is safe to touch.
November 2000, RS# 241