From Durex Industries, cast aluminum bake-and-chill platen for wafer processing utilizes a high density mineral-insulated heating element that is formed to provide a specific heat profile, then cast onto 99.7% pure aluminum. Temperature uniformity across the platen surface can achieve +/-1% of the maximum operating temperature. Zero porosity of the casting offers operating temperatures to 850oF (454 oC). Platen surface can be supplied with a hard-coat anodized finish and shipped chem-cleaned and packaged to cleanroom specifications.
May 2001, RS# 210