Heated Vacuum Valve
HPS Jalapenois designed for use in manufacturing processes such as low pressure chemical vapor deposition in semiconductor fabrication where production byproducts can condense and build up. By heating the valve, the internal temperature is elevated, leaving the byproducts in a gaseous form. Valves are offered in single- and two-stage models with an angle or inline body and a choice of seal, limit switch and solenoid options.
MKS Instruments Inc.