MSP Model 2800 uses fine-droplet technology to vaporize temperature-sensitive liquid precursor chemicals. Turbo-Vaporizer, a direct-liquid-injection (DLI) vaporizer, uses two Brooks mass-flow devices to solve many of the quality and yield issues attributed to traditional liquid vaporizers used in chemical vapor deposition and atomic layer deposition semiconductor processes. It can be used to vaporize new precursors needed in the semiconductor industry to create advanced films.
Emerson Process Management
(215) 362-3705 • www.emersonprocess.com
Liquid Injection Vaporizer
February 1, 2006