An aluminum nitride (AlN) ceramic heater technology with an embedded tungsten RTD sensor has been developed. AlN heaters are based on a multilayer ceramic heater technology, which provides improved performance when compared to traditional metal heater technologies. The RTD sensor provides the fastest possible heater measurement and response to changes in temperature. As a result, temperature ramp rates in excess of 200¡C in less than 2 seconds can be achieved. High electrical insulation resistance and high temperature rating are key attributes of AlN, which is inert to most common chemicals.