Ulvac Technologies Inc.

A built-in check valve at the inlet port prevents oil backflow, eliminating cleanups and downtime. According to the manufacturer, the GHD-031 does not leak. The magnetically coupled, oil-sealed rotary vane pumps do not have shaft seals, so the shaft seals cannot wear out. They have a pumping speed of 36 l/m and ultimate vacuum of 5 x 10-3 Torr. They are suited for analytical instruments, cryostats and general laboratory use due to their high pumping speed, cool running temperature, compact size and quiet operation.