A line of low internal volume heaters is suited for use in ultra-high purity (UHP) solvent-heating applications in semiconductor manufacturing, including wafer cleaning, etching and photoresist-stripping processes.

The SHX and SHX-EX heaters are designed to safely heat IPA and low flashpoint solvents. Features include a proprietary purge system to eliminate risks associated with high temperature fluid permeation, an indirect-heating design and low watt-density rating. Explosionproof certification also is available. The compact, indirect, inline flow path is free of contact with O-rings. Specifications include temperatures up to 194°F (90°C); pressure up to 69 psi (475 kPa); and wattages of 3, 6, 9 and 12 kW, depending on model.

Process Technology