Thermofoil heated chucks from Minco Products Inc. come in 7.9 and 11.8" (200 and 300 mm) sizes. Design options include polyimide- insulated heaters bonded to aluminum chucks to 500^oF (206^oC); mica-insulated heaters sealed into welded chucks to 932^oF (500^oC); and mica-insulated heaters between silicone carbide plates to 1,112^oF (600^oC). Design options include profiled power for uniform temperature and integral sensors for control.

May 2001, RS# 219