Heated Chucks for Semiconductor Processing
May 14, 2001
Thermofoil heated chucks from Minco Products Inc. come in 7.9 and 11.8" (200 and 300 mm) sizes. Design options include polyimide- insulated heaters bonded to aluminum chucks to 500oF (206oC); mica-insulated heaters sealed into welded chucks to 932oF (500oC); and mica-insulated heaters between silicone carbide plates to 1,112oF (600oC). Design options include profiled power for uniform temperature and integral sensors for control.
May 2001, RS# 219