Multiparameter Volumetric Mass-Flow Controller
Digital mass-flow controllers provide stable control of mass-flow rates of process gases. With simultaneous display of mass-flow, volumetric-flow, pressure and temperature parameters, it can be used with manufacturing, bioreactors and surface depositions, and gas-sampling activities. Series DPC has totalizers with batch-processing mode (0.5 percent RD +0.2 percent FS) standard accuracy, 200:1 turndown ratio and less than 150 ms response time. The controller can be used with 90 gases and gas mixes.