Streamline provides temperature uniformity, a reduced footprint, diagnostics and fast development times compared to typical systems on a semiconductor tool, says the manufacturer. Heating and controlling the thermal processes on the gas lines, forelines and exhaust lines are typically complex due to the number of components and wiring located within a small area. The Adaptive Thermal Systems allow nuisance components to be removed from the heater, and those capabilities and functions are integrated into the company’s EZ-Zone RMT controller. This provides closed-loop control with integrated overtemperature safety protection for each heater with just two wires, whhelps reduce installation errors and eases troubleshooting. 

Watlow | 314) 878-4600 |